Simulation of Nanopattern Formation of Si Surface due to Ion Irradiation

Volume 16 , Issue 1 , January 2014 , Pages 29-36

Authors

Sarwar H. Ali 1 ; S. R. Saeed 2

1 Faculty of Science and Educational Science, University of Sulaimani

2 Faculty Education - Chamchamal, University of Sulaimani

DOI logo 10.17656/jzs.10282

Keywords

Abstract

Energetic ion irradiation induce surface nano-scale patterns formation, ripple or wavelike

pattern is one of the surface morphologies. Analytical solution of the BH continuum equation, using

MATLAB applied on Si target, well-defined ripple structure were observed as a function of

different parameters such as angle of ion incidence, ion energy, ion flux, ion species, and thermal

diffusion coefficient

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  • Published at27 January 2014

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